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Standard quartz, glass or silicon bimorph mirrors:
- Diameter of aperture of the mirror - 10-500 mm
- Stroke - up to 40 μm
- Number of control electrodes - 1-128
- Frequency range - up to 5 KHz
- Hysteresis - 12 %
- Damage threshod - 20 J/cm² for Glass, 3 J/cm² for TiS
- Reflecting coatings - protected Al, protected Ag, metal-dielectric coating, multilayer dielectric coating of reflectivity ρ≥99% for given wavelength (on customer demand)
Water - cooled bimorph mirrors:
- Material - copper, silicon
- Diameter of aperture of the mirror 20-100 mm
- Stroke - up to 15 μm
- Damage threshod - 10 kW/cm² for CO2, 50 kW/cm² for Glass
- Number of control electrodes - up to 32
- Frequency range - up to 4 KHz
- Reflecting coatings: on customer demand